검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Experimental-Study on the Scaling Law of the Outgassing Rate with a Pumping Parameter Akaishi K, Kubota Y, Motojima O, Nakasuga M, Funato Y, Mushiaki M Journal of Vacuum Science & Technology A, 15(2), 258, 1997 |
| 2 |
H2O Pumping by Sputter Discharge with a LaB6 Cathode Funato Y, Miyoshi M, Akaishi K, Kubota Y, Mushiaki M Journal of Vacuum Science & Technology A, 14(2), 404, 1996 |