검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
System optimization of membrane mask distortion correction based on Fourier analysis Murooka K, Lim MH, Smith HI Journal of Vacuum Science & Technology B, 22(5), 2309, 2004 |
| 2 |
Initial results of a 50 kV electron beam writer EBM-4000 for a 90 nm node photomask Murooka K, Hattori K, Iizuka O Journal of Vacuum Science & Technology B, 21(6), 2668, 2003 |
| 3 |
Membrane mask magnification correction: Alternate technique Murooka K, Lim MH, Smith HI Journal of Vacuum Science & Technology B, 20(1), 370, 2002 |
| 4 |
Effect of thermal diffusion on a membrane-mask-distortion correction and compensation method Murooka K, Lim MH, Smith HI Journal of Vacuum Science & Technology B, 20(2), 721, 2002 |
| 5 |
Calculational study on membrane mask distortion and correction Murooka K, Lim MH, Smith HI Journal of Vacuum Science & Technology B, 19(4), 1229, 2001 |
| 6 |
Membrane-mask distortion correction: Analytical and experimental results Murooka K, Lim MH, Smith HI Journal of Vacuum Science & Technology B, 18(6), 2966, 2000 |