검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Ultra-shallow depth profiling with secondary ion mass spectrometry Tomita M, Hongo C, Suzuki M, Takenaka M, Murakoshi A Journal of Vacuum Science & Technology B, 22(1), 317, 2004 |
| 2 |
Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS Hongo C, Tomita A, Takenaka M, Murakoshi A Applied Surface Science, 203, 264, 2003 |
| 3 |
Estimation of ultra-shallow implants using SIMS NRA and chemical analysis Tomita M, Suzuki M, Tachibe T, Kozuka S, Murakoshi A Applied Surface Science, 203, 377, 2003 |
| 4 |
Depth profiling for ultrashallow implants using backside secondary ion mass spectrometry Hongo C, Tomita M, Takenaka M, Suzuki M, Murakoshi A Journal of Vacuum Science & Technology B, 21(4), 1422, 2003 |