검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Copper drift in methyl-doped silicon oxide film Cui H, Bhat IB, Muraka SP, Lu HQ, Hsia WJ, Catabay W Journal of Vacuum Science & Technology B, 20(5), 1987, 2002 |
| 2 |
Thermal-Stability of on-Chip Copper Interconnect Structures Gutmann RJ, Chow TP, Kaloyeros AE, Lanford WA, Muraka SP Thin Solid Films, 262(1-2), 177, 1995 |
| 3 |
Low-Temperature Passivation of Copper by Doping with Al or Mg Lanford WA, Ding PJ, Wang W, Hymes S, Muraka SP Thin Solid Films, 262(1-2), 234, 1995 |