화학공학소재연구정보센터
검색결과 : 12건
No. Article
1 Multi-scale modelling of silicon nanocrystal synthesis by Low Pressure Chemical Vapor Deposition
Zahi I, Mur P, Blaise P, Esteve A, Rouhani MD, Vergnes H, Caussat B
Thin Solid Films, 519(22), 7650, 2011
2 Influence of the synthesis conditions of silicon nanodots in an industrial low pressure chemical vapor deposition reactor
Cocheteau V, Scheid E, Mur P, Billon T, Caussat B
Applied Surface Science, 254(10), 2927, 2008
3 Development of an original model for the synthesis of silicon nanodots by Low Pressure Chemical Vapor Deposition
Cocheteau V, Mur P, Billon T, Scheid E, Caussat B
Chemical Engineering Journal, 140(1-3), 600, 2008
4 Using silicon nanostructures for the improvement of silicon solar cells efficiency
De la Torre J, Bremond G, Lemiti M, Guillot G, Mur P, Buffet N
Thin Solid Films, 511, 163, 2006
5 Growth and characterization of LPCVD Si quantum dots on insulators
Baron T, Mazen F, Hartmann JM, Mur P, Puglisi RA, Lombardo S, Ammendola G, Gerardi C
Solid-State Electronics, 48(9), 1503, 2004
6 Development of silicon nitride dots for nanocrystal memory cells
Wan YM, Buffet N, van der Jeugd K, Mur P, Mariolle D, Nicotra G, Lombardo S
Solid-State Electronics, 48(9), 1519, 2004
7 Influence of the chemical properties of the substrate on silicon quantum dot nucleation
Mazen F, Baron T, Bremond G, Buffet N, Rochat N, Mur P, Semeria MN
Journal of the Electrochemical Society, 150(3), G203, 2003
8 A 0.10 mu m buried p-channel MOSFET with through the gate boron implantation and arsenic tilted pocket
Guegan G, Deleonibus S, Caillat C, Tedesco S, Dal'zotto B, Heitzmann M, Nier ME, Mur P
Solid-State Electronics, 46(3), 343, 2002
9 A 20 nm physical gate length NMOSFET with a 1.2 nm gate oxide fabricated by mixed dry and wet hard mask etching
Caillat C, Deleonibus S, Guegan G, Heitzmann M, Nier ME, Tedesco S, Dal'zotto B, Martin F, Mur P, Papon AM, Lecarval G, Previtali B, Toffoli A, Allain F, Biswas S, Jourdan F, Fugier P, Dichiaro JL
Solid-State Electronics, 46(3), 349, 2002
10 Ultra-thin oxides grown on silicon (100) by rapid thermal oxidation for CMOS and advanced devices
Mur P, Semeria MN, Olivier M, Papon AM, Leroux C, Reimbold G, Gentile P, Magnea N, Baron T, Clerc R, Ghibaudo G
Applied Surface Science, 175, 726, 2001