검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Modelling and optimal controller design of networked control systems with multiple delays Lian FL, Moyne J, Tilbury D International Journal of Control, 76(6), 591, 2003 |
| 2 |
Multizone uniformity control of a chemical mechanical polishing process utilizing a pre- and postmeasurement strategy El Chemali C, Moyne J, Khan K, Nadeau R, Smith P, Colt J, Chapple-Sokol J, Parikh T Journal of Vacuum Science & Technology A, 18(4), 1287, 2000 |
| 3 |
A Multilevel Approach to the Control of a Chemical-Mechanical Planarization Process Telfeyan R, Moyne J, Chaudhry N, Pugmire J, Shellman S, Boning D, Moyne W, Hurwitz A, Taylor J Journal of Vacuum Science & Technology A, 14(3), 1907, 1996 |