검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Effect of thermal annealing on the structural and mechanical properties of amorphous silicon carbide films prepared by polymer-source chemical vapor deposition Awad Y, El Khakani MA, Brassard D, Smirani R, Camire N, Lessard M, Aktik C, Scarlete M, Mouine J Thin Solid Films, 518(10), 2738, 2010 |
| 2 |
Thermally induced interfacial interactions between. various metal substrates and a-SiC thin films deposited by a polymer-source chemical vapor deposition Awad Y, Khakani MA, Aktik C, Mouine J, Camire N, Lessard M, Scarlete M Materials Chemistry and Physics, 104(2-3), 350, 2007 |
| 3 |
Resistless electron beam lithography process for the fabrication of sub-50 nm silicide structures Drouin D, Beauvais J, Lavallee E, Michel S, Mouine J, Gauvin R Journal of Vacuum Science & Technology B, 15(6), 2269, 1997 |