검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Experimental study of the effects of showerhead configuration on large-area silicon-nitride thin film by plasma-enhanced chemical vapor deposition Xia HX, Xiang D, Mou P, Yang W Thin Solid Films, 638, 1, 2017 |
| No. | Article |
|---|---|
| 1 |
Experimental study of the effects of showerhead configuration on large-area silicon-nitride thin film by plasma-enhanced chemical vapor deposition Xia HX, Xiang D, Mou P, Yang W Thin Solid Films, 638, 1, 2017 |