검색결과 : 2건
No. | Article |
---|---|
1 |
Structural and optical characterization of low-temperature ALD crystalline AlN Motamedi P, Cadien K Journal of Crystal Growth, 421, 45, 2015 |
2 |
XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition Motamedi P, Cadien K Applied Surface Science, 315, 104, 2014 |