검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma impacts to an O-SiC low-k barrier film Chen W, Han QY, Most R, Waldfried C, Escorcia O, Berry I Journal of the Electrochemical Society, 151(8), F182, 2004 |
| No. | Article |
|---|---|
| 1 |
Plasma impacts to an O-SiC low-k barrier film Chen W, Han QY, Most R, Waldfried C, Escorcia O, Berry I Journal of the Electrochemical Society, 151(8), F182, 2004 |