검색결과 : 1건
No. | Article |
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1 |
Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO2 Waechtler T, Oswald S, Roth N, Jakob A, Lang H, Ecke R, Schulz SE, Gessner T, Moskvinova A, Schulze S, Hietschold M Journal of the Electrochemical Society, 156(6), H453, 2009 |