검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Numerical study on bubble trapping in UV nanoimprint lithography Morihara D, Nagaoka Y, Hiroshima H, Hirai Y Journal of Vacuum Science & Technology B, 27(6), 2866, 2009 |
| No. | Article |
|---|---|
| 1 |
Numerical study on bubble trapping in UV nanoimprint lithography Morihara D, Nagaoka Y, Hiroshima H, Hirai Y Journal of Vacuum Science & Technology B, 27(6), 2866, 2009 |