검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Sn etching with hydrogen radicals to clean EUV optics van Herpen MMJW, Klunder DJW, Soer WA, Moors R, Banine V Chemical Physics Letters, 484(4-6), 197, 2010 |
| 2 |
Particle Cleaning of EUV Reticles Scaccabarozzi L, Lammers NA, Moors R, Banine V Journal of Adhesion Science and Technology, 23(12), 1603, 2009 |
| 3 |
Electrostatic mask protection for extreme ultraviolet lithography Moors R, Heerens GJ Journal of Vacuum Science & Technology B, 20(1), 316, 2002 |
| 4 |
Kinetic study of high-pressure pulverized coal char combustion: Experiments and modelling Banin V, Moors R, Veefkind B Fuel, 76(10), 945, 1997 |