검색결과 : 17건
| No. | Article |
|---|---|
| 1 |
Coherent diffraction lithography: Periodic patterns via mask-based interference lithography Fucetola CP, Patel AA, Moon EE, O'Reilly TB, Smith HI Journal of Vacuum Science & Technology B, 27(6), 2947, 2009 |
| 2 |
Nanometer-level alignment to a substrate-embedded coordinate system Moon EE, Smith HI Journal of Vacuum Science & Technology B, 26(6), 2341, 2008 |
| 3 |
Atomic-force lithography with interferometric tip-to-substrate position metrology Moon EE, Kupec J, Mondol MK, Smith HI, Berggren KK Journal of Vacuum Science & Technology B, 25(6), 2284, 2007 |
| 4 |
Dynamic alignment control for fluid-immersion lithographies using interferometric-spatial-phase imaging Moon EE, Mondol MK, Everett PN, Smith HI Journal of Vacuum Science & Technology B, 23(6), 2607, 2005 |
| 5 |
Alpha-prototype system for zone-plate-array lithography Menon R, Patel A, Moon EE, Smith HI Journal of Vacuum Science & Technology B, 22(6), 3032, 2004 |
| 6 |
Elliptical-ring magnetic arrays fabricated using zone-plate-array lithography Jung W, Castano FJ, Ross CA, Menon R, Patel A, Moon EE, Smith HI Journal of Vacuum Science & Technology B, 22(6), 3335, 2004 |
| 7 |
Nanometer gap measurement and verification via the chirped-Talbot effect Moon EE, Chen L, Everett PN, Mondol MK, Smith HI Journal of Vacuum Science & Technology B, 22(6), 3378, 2004 |
| 8 |
Scanning-spatial-phase alignment for zone-plate-array lithography Menon R, Moon EE, Mondol MK, Castano FJ, Smith HI Journal of Vacuum Science & Technology B, 22(6), 3382, 2004 |
| 9 |
Interferometric-spatial-phase imaging for six-axis mask control Moon EE, Chen L, Everett PN, Mondol MK, Smith HI Journal of Vacuum Science & Technology B, 21(6), 3112, 2003 |
| 10 |
Novel mask-wafer gap measurement scheme with nanometer-level detectivity Moon EE, Everett PN, Meinhold MW, Mondol MK, Smith HI Journal of Vacuum Science & Technology B, 17(6), 2698, 1999 |