검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Doppler writing and linewidth control for scanning beam interference lithography Montoya JC, Chang CH, Heilmann RK, Schattenburg ML Journal of Vacuum Science & Technology B, 23(6), 2640, 2005 |
| 2 |
High fidelity blazed grating replication using nanoimprint lithography Chang CH, Montoya JC, Akilian M, Lapsa A, Heilmann RK, Schattenburg ML, Li M, Flanagan KA, Rasmussen AP, Seely JF, Laming JM, Kjornrattanawanich B, Goray LI Journal of Vacuum Science & Technology B, 22(6), 3260, 2004 |
| 3 |
Nanometer-level repeatable metrology using the nanoruler Konkola PT, Chen CG, Heilmann RK, Joo CM, Montoya JC, Chang CH, Schattenburg ML Journal of Vacuum Science & Technology B, 21(6), 3097, 2003 |