검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist Winston D, Cord BM, Ming B, Bell DC, DiNatale WF, Stern LA, Vladar AE, Postek MT, Mondol MK, Yang JKW, Berggren KK Journal of Vacuum Science & Technology B, 27(6), 2702, 2009 |
| 2 |
Atomic-force lithography with interferometric tip-to-substrate position metrology Moon EE, Kupec J, Mondol MK, Smith HI, Berggren KK Journal of Vacuum Science & Technology B, 25(6), 2284, 2007 |
| 3 |
Dynamic alignment control for fluid-immersion lithographies using interferometric-spatial-phase imaging Moon EE, Mondol MK, Everett PN, Smith HI Journal of Vacuum Science & Technology B, 23(6), 2607, 2005 |
| 4 |
Fabrication of photonic crystal waveguides composed of a square lattice of dielectric rods Assefa S, Petrich GS, Kolodziejski LA, Mondol MK, Smith HI Journal of Vacuum Science & Technology B, 22(6), 3363, 2004 |
| 5 |
Nanometer gap measurement and verification via the chirped-Talbot effect Moon EE, Chen L, Everett PN, Mondol MK, Smith HI Journal of Vacuum Science & Technology B, 22(6), 3378, 2004 |
| 6 |
Scanning-spatial-phase alignment for zone-plate-array lithography Menon R, Moon EE, Mondol MK, Castano FJ, Smith HI Journal of Vacuum Science & Technology B, 22(6), 3382, 2004 |
| 7 |
Interferometric-spatial-phase imaging for six-axis mask control Moon EE, Chen L, Everett PN, Mondol MK, Smith HI Journal of Vacuum Science & Technology B, 21(6), 3112, 2003 |
| 8 |
Characterization of field stitching in electron-beam lithography using moire metrology Murphy TE, Mondol MK, Smith HI Journal of Vacuum Science & Technology B, 18(6), 3287, 2000 |
| 9 |
Novel mask-wafer gap measurement scheme with nanometer-level detectivity Moon EE, Everett PN, Meinhold MW, Mondol MK, Smith HI Journal of Vacuum Science & Technology B, 17(6), 2698, 1999 |
| 10 |
Maskless, parallel patterning with zone-plate array lithography Carter DJD, Gil D, Menon R, Mondol MK, Smith HI, Anderson EH Journal of Vacuum Science & Technology B, 17(6), 3449, 1999 |