검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
A review of ion projection lithography Melngailis J, Mondelli AA, Berry IL, Mohondro R Journal of Vacuum Science & Technology B, 16(3), 927, 1998 |
| 2 |
Programmable aperture plate for maskless high-throughput nanolithography Berry IL, Mondelli AA, Nichols J, Melngailis J Journal of Vacuum Science & Technology B, 15(6), 2382, 1997 |
| 3 |
Global and Stochastic Space-Charge Effects in Ion-Beam Lithography Petillo JJ, Mondelli AA Journal of Vacuum Science & Technology B, 13(6), 2409, 1995 |
| 4 |
Novel Electrostatic Column for Ion Projection Lithography Chalupka A, Stengl G, Buschbeck H, Lammer G, Vonach H, Fischer R, Hammel E, Loschner H, Nowak R, Wolf P, Finkelstein W, Hill RW, Berry IL, Harriott LR, Melngailis J, Randall JN, Wolfe JC, Stroh H, Wollnik H, Mondelli AA, Petillo JJ, Leung K Journal of Vacuum Science & Technology B, 12(6), 3513, 1994 |