화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Penning type magnetron sputtering source and its use in the production of carbon nitride coatings
Murphy MJ, Monaghan J, Tyrrell M, Walsh R, Cameron DG, Chowdhury AKMS, Monclus M, Hashmi MSJ
Journal of Vacuum Science & Technology A, 17(1), 62, 1999
2 The composition and bonding structure of CNx films and their influence on the mechanical properties
Chowdhury AKMS, Monclus M, Cameron DC, Gilvarry J, Murphy MJ, Barradas NP, Hashmi MSJ
Thin Solid Films, 308-309, 130, 1997