검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Sputtering with an etch-free lift-off in thermal nanoimprint lithography Mayer A, Bogdanski N, Mollenbeck S, Dhima K, Papenheim M, Scheer HC Journal of Vacuum Science & Technology B, 28(6), C6M136, 2010 |
| 2 |
Aspects of hybrid pattern definition while combining thermal nanoimprint with optical lithography Scheer HC, Mollenbeck S, Mayer A, Dhima K Journal of Vacuum Science & Technology B, 28(6), C6M1, 2010 |
| 3 |
Thermal imprint into thin polymer layers below the critical molecular weight Bogdanski N, Wissen M, Mollenbeck S, Scheer HC Journal of Vacuum Science & Technology B, 27(3), 1191, 2009 |
| 4 |
Recovery prevention via pressure control in thermal nanoimprint lithography Scheer HC, Bogdanski N, Mollenbeck S, Mayer A Journal of Vacuum Science & Technology B, 27(6), 2882, 2009 |
| 5 |
Preparation of diamond-shaped channels in SU-8 for optical control of the filling state Mollenbeck S, Bogdanski N, Mayer A, Scheer HC, Zajadacz J, Zimmer K Journal of Vacuum Science & Technology B, 27(6), 3078, 2009 |
| 6 |
Quality assessment of antisticking layers for thermal nanoimprint Scheer HC, Hafner W, Fidler A, Mollenbeck S, Bogdanski N Journal of Vacuum Science & Technology B, 26(6), 2380, 2008 |
| 7 |
Contact angles in a thermal imprint process Bogdanski N, Mollenbeck S, Scheer HC Journal of Vacuum Science & Technology B, 26(6), 2416, 2008 |
| 8 |
Multiple replication of three dimensional structures with undercuts Mollenbeck S, Bogdanski N, Wissen M, Scheer HC, Zajadacz J, Zimmer K Journal of Vacuum Science & Technology B, 25(1), 247, 2007 |
| 9 |
Impact of glass temperature for thermal nanoimprint Scheer HC, Bogdanski N, Wissen M, Mollenbeck S Journal of Vacuum Science & Technology B, 25(6), 2392, 2007 |
| 10 |
Thermal imprint with negligibly low residual layer Bogdanski N, Wissen M, Mollenbeck S, Scheer HC Journal of Vacuum Science & Technology B, 24(6), 2998, 2006 |