검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Stable titanium silicide formation on field oxide after BF2 ion implantation Mollat M, Demkov AA, Fejes P, Werho D Journal of Vacuum Science & Technology B, 19(2), 372, 2001 |
| No. | Article |
|---|---|
| 1 |
Stable titanium silicide formation on field oxide after BF2 ion implantation Mollat M, Demkov AA, Fejes P, Werho D Journal of Vacuum Science & Technology B, 19(2), 372, 2001 |