검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Long-Throw Low-Pressure Sputtering Technology for Very Large-Scale Integrated Devices Motegi N, Kashimoto Y, Nagatani K, Takahashi S, Kondo T, Mizusawa Y, Nakayama I Journal of Vacuum Science & Technology B, 13(4), 1906, 1995 |