검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Improvement of SiC wafer warp by annealing Sasaki M, Harada S, Okamoto Y, Miyanagi Y, Shiomi H Materials Science Forum, 457-460, 829, 2004 |
| 2 |
The development of 2in 6H-SiC wafer with high thermal-conductivity Miyanagi Y, Nakayama K, Shiomi H, Nishino S Materials Science Forum, 389-3, 51, 2002 |
| 3 |
The development of 4H-SiC {03(3)over-bar8) wafers Nakayama K, Miyanagi Y, Shiomi H, Nishino S, Kimoto T, Matsunami H Materials Science Forum, 389-3, 123, 2002 |
| 4 |
The effect of epitaxial growth on warp of SiC wafers Nakayama K, Miyanagi Y, Maruyama K, Okamoto Y, Shiomi H, Nishino S Materials Science Forum, 389-3, 235, 2002 |
| 5 |
Stress distribution in 2in SiC wafer measured by photoelastic method Sasaki M, Miyanagi Y, Nakayama K, Shiomi H, Nishino S Materials Science Forum, 389-3, 403, 2002 |