검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Hydrothermal treatment followed by enzymatic hydrolysis and hydrothermal carbonization as means to valorise agro- and forest-based biomass residues Wikberg H, Gronqvist S, Niemi P, Mikkelson A, Siika-Aho M, Kanerva H, Kasper A, Tamminen T Bioresource Technology, 235, 70, 2017 |
| 2 |
Predicting the dynamic response of an extreme ultraviolet reticle during exposure scanning Dicks G, Mikkelson A, Engelstad R, Lovell E Journal of Vacuum Science & Technology B, 23(6), 2856, 2005 |
| 3 |
Effect of electrostatic chucking and substrate thickness uniformity on extreme ultraviolet lithography mask flatness Mikkelson A, Engelstad R, Sohn J, Lovell E Journal of Vacuum Science & Technology B, 22(6), 3043, 2004 |
| 4 |
Stress and image-placement distortions of 200 mm low-energy electron projection lithography masks Eguchi H, Susa T, Sumida T, Kurosu T, Yoshii T, Yotsui K, Itoh K, Tamura A, Engelstad RL, Lovell EG, Azkorra X, Mikkelson A, Chang J, Janowski SM Journal of Vacuum Science & Technology B, 22(6), 3087, 2004 |
| 5 |
Extreme ultraviolet lithography mask flatness and electrostatic chucking analysis Mikkelson A, Engelstad R, Lovell E, Blaedel K, Claudet A Journal of Vacuum Science & Technology B, 21(6), 3091, 2003 |