화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Electrical and Physical Properties of Er-Doped HfO2 High-k Dielectrics Prepared by Atomic Layer Deposition
Wu L, Yu HY, Pey KL, Pan JS, Tuominen M, Tois E, Lee DY, Hsu KY, Huang KT, Tao HJ, Mii YJ
Electrochemical and Solid State Letters, 13(2), G21, 2010
2 High-Performance Sub-0.1 Mu-M Silicon N-Metal Oxide Semiconductor Transistors with Composite Metal Polysilicon Gates
Rishton SA, Mii YJ, Kern DP, Taur Y, Lee KY, Lii T, Jenkins K, Quinlan D, Brown T, Danner D, Sewell F, Polcari M
Journal of Vacuum Science & Technology B, 11(6), 2612, 1993