검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Effects of precursor evaporation temperature on the properties of the yttrium oxide thin films deposited by microwave electron cyclotron resonance plasma assisted metal organic chemical vapor deposition Barve SA, Jagannath, Mithal N, Deo MN, Biswas A, Mishra R, Kishore R, Bhanage BM, Gantayet LM, Patil DS Thin Solid Films, 519(10), 3011, 2011 |
| 2 |
Effect of bias in patterning diamond by a dual electron cyclotron resonance-radio-frequency oxygen plasma Wang L, Zhu XD, Ke B, Ni TL, Ding F, Chen MD, Wen XH, Zhou HY Thin Solid Films, 518(8), 1985, 2010 |
| 3 |
Hydrogen-free diamond-like carbon films prepared by microwave electron cyclotron resonance plasma-enhanced direct current magnetron sputtering Ru LL, Huang JJ, Gao LA, Qi B Thin Solid Films, 519(1), 86, 2010 |