검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Molecular dynamics simulation of subnanometric tool-workpiece contact on a force sensor-integrated fast tool servo for ultra-precision microcutting Cai YD, Chen YL, Shimizu Y, Ito S, Gao W, Zhang LC Applied Surface Science, 369, 354, 2016 |
| 2 |
Micromachining of semiconductor by femtosecond laser for integrated circuit defect analysis Halbwax M, Sarnet T, Hermann J, Delaporte P, Sentis M, Fares L, Haller G Applied Surface Science, 254(4), 911, 2007 |