검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Charge induced pattern distortion in low energy electron beam lithography Satyalakshmi KM, Olkhovets A, Metzler MG, Harnett CK, Tanenbaum DM, Craighead HG Journal of Vacuum Science & Technology B, 18(6), 3122, 2000 |
| No. | Article |
|---|---|
| 1 |
Charge induced pattern distortion in low energy electron beam lithography Satyalakshmi KM, Olkhovets A, Metzler MG, Harnett CK, Tanenbaum DM, Craighead HG Journal of Vacuum Science & Technology B, 18(6), 3122, 2000 |