검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Magnetic field optimization in a dielectric magnetically enhanced reactive ion etch reactor to produce an instantaneously uniform plasma Lindley RA, Bjorkman CH, Shan H, Ke KH, Doan K, Mett RR, Welch M Journal of Vacuum Science & Technology A, 16(3), 1600, 1998 |