검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma-surface interactions for advanced plasma etching processes in nanoscale ULSI device fabrication: A numerical and experimental study Ono K, Ohta H, Eriguchi K Thin Solid Films, 518(13), 3461, 2010 |
| No. | Article |
|---|---|
| 1 |
Plasma-surface interactions for advanced plasma etching processes in nanoscale ULSI device fabrication: A numerical and experimental study Ono K, Ohta H, Eriguchi K Thin Solid Films, 518(13), 3461, 2010 |