검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
TEM characterization of ALD layers in deep trenches using a dedicated FIB lamellae preparation method Gluch J, Rossler T, Schmidt D, Menzel SB, Albert M, Eckert J Thin Solid Films, 518(16), 4553, 2010 |
| No. | Article |
|---|---|
| 1 |
TEM characterization of ALD layers in deep trenches using a dedicated FIB lamellae preparation method Gluch J, Rossler T, Schmidt D, Menzel SB, Albert M, Eckert J Thin Solid Films, 518(16), 4553, 2010 |