화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Long-term stability of Ru-based protection layers in extreme ultraviolet lithography: A surface science approach
Over H, He YB, Farkas A, Mellau G, Korte C, Knapp M, Chandhok M, Fang M
Journal of Vacuum Science & Technology B, 25(4), 1123, 2007
2 C(1)-C(Alpha) Torsion Potential Function and Vibrational Assignments of Trans-Beta-Methylstyrene from S-1-S-0 Supersonic Jet Fluorescence-Spectra
Sinclair WE, Yu H, Phillips D, Gordon RD, Hollas JM, Klee S, Mellau G
Journal of Physical Chemistry, 99(13), 4386, 1995