검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Characterization and modeling of volumetric and mechanical properties for step and flash imprint lithography photopolymers Colburn M, Suez I, Choi BJ, Meissl M, Bailey T, Sreenivasan SV, Ekerdt JG, Willson CG Journal of Vacuum Science & Technology B, 19(6), 2685, 2001 |
| 2 |
Step and flash imprint lithography: Defect analysis Bailey T, Smith B, Choi BJ, Colburn M, Meissl M, Sreenivasan SV, Ekerdt JG, Willson CG Journal of Vacuum Science & Technology B, 19(6), 2806, 2001 |
| 3 |
Step and flash imprint lithography: Template surface treatment and defect analysis Bailey T, Choi BJ, Colburn M, Meissl M, Shaya S, Ekerdt JG, Sreenivasan SV, Willson CG Journal of Vacuum Science & Technology B, 18(6), 3572, 2000 |