검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Electron beam induced conductivity in poly(methylmethacrylate) and SiO2 thin films Bai M, Pease RFW, Meisburger D Journal of Vacuum Science & Technology B, 21(6), 2638, 2003 |
| 2 |
Charging and discharging of electron beam resist films Bai M, Pease RFW, Tanasa C, McCord MA, Pickard DS, Meisburger D Journal of Vacuum Science & Technology B, 17(6), 2893, 1999 |
| 3 |
Inspection of Optical Phase-Shifting Masks with an Automated Electron-Beam System Brodie AD, Chen ZW, Jau J, Meisburger D, Grenon B Journal of Vacuum Science & Technology B, 12(6), 3595, 1994 |