검색결과 : 5건
No. | Article |
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1 |
Laser-induced fluorescence ion diagnostics in light of plasma processing McWilliams R, Booth JP, Hudson EA, Thomas J, Zimmerman D Thin Solid Films, 515(12), 4860, 2007 |
2 |
Proceedings of the Joint Meeting of the 71h APCPST (Asia Pacific Conference on Plasma Science and Technology) and the 171h SPSM (Symposium on Plasma Science for Materials) Fukuoka, Japan, June 29 July 2, 2004 - Preface Watanabe Y, Asano T, Chang HY, Fujiyama H, McWilliams R, Watanabe T Thin Solid Films, 506, 1, 2006 |
3 |
Laser-induced fluorescence measurements for plasma processing McWilliams R, Boehmer H, Edrich D, Zhao L, Zimmerman D Thin Solid Films, 506, 665, 2006 |
4 |
Ion flow and sheath physics studies in multiple ion species plasmas using diode laser based laser-induced fluorescence Severn GD, Wang X, Ko E, Hershkowitz N, Turner MM, McWilliams R Thin Solid Films, 506, 674, 2006 |
5 |
Laser-induced fluorescence diagnosis of plasma processing sources McWilliams R, Edrich D Thin Solid Films, 435(1-2), 1, 2003 |