화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Laser-induced fluorescence ion diagnostics in light of plasma processing
McWilliams R, Booth JP, Hudson EA, Thomas J, Zimmerman D
Thin Solid Films, 515(12), 4860, 2007
2 Proceedings of the Joint Meeting of the 71h APCPST (Asia Pacific Conference on Plasma Science and Technology) and the 171h SPSM (Symposium on Plasma Science for Materials) Fukuoka, Japan, June 29 July 2, 2004 - Preface
Watanabe Y, Asano T, Chang HY, Fujiyama H, McWilliams R, Watanabe T
Thin Solid Films, 506, 1, 2006
3 Laser-induced fluorescence measurements for plasma processing
McWilliams R, Boehmer H, Edrich D, Zhao L, Zimmerman D
Thin Solid Films, 506, 665, 2006
4 Ion flow and sheath physics studies in multiple ion species plasmas using diode laser based laser-induced fluorescence
Severn GD, Wang X, Ko E, Hershkowitz N, Turner MM, McWilliams R
Thin Solid Films, 506, 674, 2006
5 Laser-induced fluorescence diagnosis of plasma processing sources
McWilliams R, Edrich D
Thin Solid Films, 435(1-2), 1, 2003