검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Oxygen plasma damage to blanket and patterned ultralow-kappa surfaces Bao J, Shi H, Huang H, Ho PS, McSwiney ML, Goodner MD, Moinpour M, Kloster GM Journal of Vacuum Science & Technology A, 28(2), 207, 2010 |
| No. | Article |
|---|---|
| 1 |
Oxygen plasma damage to blanket and patterned ultralow-kappa surfaces Bao J, Shi H, Huang H, Ho PS, McSwiney ML, Goodner MD, Moinpour M, Kloster GM Journal of Vacuum Science & Technology A, 28(2), 207, 2010 |