검색결과 : 1건
No. | Article |
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1 |
Strong effect of dopant concentration gradient an etching rate Ukraintsev VA, McGlothlin R, Gribelyuk MA, Edwards H Journal of Vacuum Science & Technology B, 16(1), 476, 1998 |
No. | Article |
---|---|
1 |
Strong effect of dopant concentration gradient an etching rate Ukraintsev VA, McGlothlin R, Gribelyuk MA, Edwards H Journal of Vacuum Science & Technology B, 16(1), 476, 1998 |