검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Fourier transform infrared spectroscopy studies of water-polymer interactions in chemically amplified photoresists McDonough LA, Chikan V, Kim ZH, Leone SR, Hinsberg WD Journal of Vacuum Science & Technology B, 23(2), 344, 2005 |
| 2 |
Water vapor uptake in photolithographic polymers observed by infrared near-field scanning optical microscopy in a controlled environment McDonough LA, Dragnea B, Preusser J, Leone SR, Hinsberg WD Journal of Physical Chemistry B, 107(21), 4951, 2003 |
| 3 |
Chemical mapping of patterned polymer photoresists by near-field infrared microscopy Dragnea B, Preusser J, Szarko JM, McDonough LA, Leone SR, Hinsberg WD Applied Surface Science, 175, 783, 2001 |