검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Fabrication of nanoelectromechanical resonators using a cryogenic etching technique Nelson-Fitzpatrick N, Westra K, Li P, McColman S, Wilding N, Evoy S Journal of Vacuum Science & Technology B, 24(6), 2769, 2006 |
| No. | Article |
|---|---|
| 1 |
Fabrication of nanoelectromechanical resonators using a cryogenic etching technique Nelson-Fitzpatrick N, Westra K, Li P, McColman S, Wilding N, Evoy S Journal of Vacuum Science & Technology B, 24(6), 2769, 2006 |