검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Intelligent Model-Based Control-System Employing in-Situ Ellipsometry Butler SW, Stefani J, Sullivan M, Maung S, Barna G, Henck S Journal of Vacuum Science & Technology A, 12(4), 1984, 1994 |
| 2 |
High-Speed Spectral Ellipsometry for in-Situ Diagnostics and Process-Control Duncan WM, Henck SA, Kuehne JW, Loewenstein LM, Maung S Journal of Vacuum Science & Technology B, 12(4), 2779, 1994 |
| 3 |
Sensor Integration into Plasma Etch Reactors of a Developmental Pilot Line Barna GG, Loewenstein LM, Brankner KJ, Butler SW, Mozumder PK, Stefani JA, Henck SA, Chapados P, Buck D, Maung S, Saxena S, Unruh A Journal of Vacuum Science & Technology B, 12(4), 2860, 1994 |