검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Comparison of the sputter rates of oxide films relative to the sputter rate of SiO2 Baer DR, Engelhard MH, Lea AS, Nachimuthu P, Droubay TC, Kim J, Lee B, Mathews C, Opila RL, Saraf LV, Stickle WF, Wallace RM, Wright BS Journal of Vacuum Science & Technology A, 28(5), 1060, 2010 |