검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Influence of atomic layer deposition parameters on the phase content of Ta2O5 films Kukli K, Ritala M, Matero R, Leskela M Journal of Crystal Growth, 212(3-4), 459, 2000 |
| 2 |
Effect of water dose on the atomic layer deposition rate of oxide thin films Matero R, Rahtu A, Ritala M, Leskela M, Sajavaara T Thin Solid Films, 368(1), 1, 2000 |
| 3 |
Introducing Atomic Layer Epitaxy for the Deposition of Optical Thin-Films Riihela D, Ritala M, Matero R, Leskela M Thin Solid Films, 289(1-2), 250, 1996 |