검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Investigation of particle generation during the low-pressure chemical vapor deposition of borophosphosilicate glass films Rao NP, Nijhawan S, Kim T, Wu Z, Campbell S, Kittelson D, McMurry P, Cheng CC, Mastromatteo E Journal of the Electrochemical Society, 145(6), 2051, 1998 |