화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Parasitic resistance considerations of using elevated source/drain technology for deep submicron metal oxide semiconductor field effect transistors
Sun J, Bartholomew RF, Bellur K, Srivastava A, Osburn CM, Masnari NA, Westhoff R
Journal of the Electrochemical Society, 145(6), 2131, 1998
2 A Comparative-Study of N(+)/P Junction Formation for Deep-Submicron Elevated Source/Drain Metal-Oxide-Semiconductor Field-Effect Transistors
Sun J, Bartholomew RF, Bellur K, Srivastava A, Osburn CM, Masnari NA, Westhoff R
Journal of the Electrochemical Society, 144(10), 3659, 1997
3 Single-Wafer Process Integration for Submicron Structures
Masnari NA
Journal of Vacuum Science & Technology B, 12(4), 2749, 1994