검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
In situ probing of surface hydrides on hydrogenated amorphous silicon using attenuated total reflection infrared spectroscopy Kessels WMM, Marra DC, van de Sanden MCM, Aydil ES Journal of Vacuum Science & Technology A, 20(3), 781, 2002 |
| 2 |
On the growth mechanism of a-Si : H Kessels WMM, Smets AHM, Marra DC, Aydil ES, Schram DC, van de Sanden MCM Thin Solid Films, 383(1-2), 154, 2001 |
| 3 |
Silicon hydride composition of plasma-deposited hydrogenated amorphous and nanocrystalline silicon films and surfaces Marra DC, Edelberg EA, Naone RL, Aydil ES Journal of Vacuum Science & Technology A, 16(6), 3199, 1998 |
| 4 |
Effect of H-2 Addition on Surface-Reactions During CF4/H-2 Plasma-Etching of Silicon and Silicon Dioxide Films Marra DC, Aydil ES Journal of Vacuum Science & Technology A, 15(5), 2508, 1997 |