검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
CVD of tantalum oxide dielectric thin films for nanoscale device applications Zeng WX, Eisenbraun E, Frisch H, Sullivan JJ, Kaloyeros AE, Margalit J, Beck K Journal of the Electrochemical Society, 151(8), F172, 2004 |
| No. | Article |
|---|---|
| 1 |
CVD of tantalum oxide dielectric thin films for nanoscale device applications Zeng WX, Eisenbraun E, Frisch H, Sullivan JJ, Kaloyeros AE, Margalit J, Beck K Journal of the Electrochemical Society, 151(8), F172, 2004 |