검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Dimensional Metrology with Scanning Probe Microscopes Griffith JE, Marchman HM, Miller GL, Hopkins LC Journal of Vacuum Science & Technology B, 13(3), 1100, 1995 |
| 2 |
Optical Probe Microscope for Nondestructive Metrology of Large-Sample Surfaces Marchman HM, Griffith JE, Trautman JK Journal of Vacuum Science & Technology B, 13(3), 1106, 1995 |
| 3 |
Edge Position Measurement with a Scanning Probe Microscope Griffith JE, Marchman HM, Hopkins LC Journal of Vacuum Science & Technology B, 12(6), 3567, 1994 |
| 4 |
Nanometer-Scale Dimensional Metrology for Advanced Lithography Marchman HM, Griffith JE, Guo JZ, Frackoviak J, Celler GK Journal of Vacuum Science & Technology B, 12(6), 3585, 1994 |
| 5 |
Line-Profile Measurement with a Scanning Probe Microscope Griffith JE, Marchman HM, Miller GL, Hopkins LC, Vasile MJ, Schwalm SA Journal of Vacuum Science & Technology B, 11(6), 2473, 1993 |
| 6 |
Metrology for Phase-Shifting Masks Marchman HM, Vaidya S, Pierrat C, Griffith J Journal of Vacuum Science & Technology B, 11(6), 2482, 1993 |