검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
3 omega thermal conductivity measurements of thin film dielectrics on silicon for use in cantilever-based IR imaging Jones CDW, Pardo F, Pai CS, Bower JE, Miner JF, Klemens FP, Cirelli RA, Ferry EJ, Taylor JA, Baker MR, Dennis BS, Mansfield WM, Kornblit A, Keller RC, Gates JV, Ramirez AP Journal of Vacuum Science & Technology B, 27(3), 1207, 2009 |
| 2 |
Spatial light modulator for maskless optical projection lithography Watson GP, Aksyuk V, Simon ME, Tennant DM, Cirelli RA, Mansfield WM, Pardo F, Lopez DO, Bolle CA, Papazian AR, Basavanhally N, Lee J, Fullowan R, Klemens F, Miner J, Kornblit A, Sorsch T, Fetter L, Peabody M, Bower JE, Weiner JS, Low YL Journal of Vacuum Science & Technology B, 24(6), 2852, 2006 |
| 3 |
Linewidth reduction using liquid ashing for sub-100 nm critical dimensions with 248 nm lithography Timko AG, Frackoviak J, Hopkins LC, Klemens FP, Trimble LE, Nalamasu O, Watson GP, Mansfield WM, Barr D, Li J Journal of Vacuum Science & Technology B, 19(6), 2713, 2001 |
| 4 |
Plasma-Etching Process-Development Using in-Situ Optical-Emission and Ellipsometry Lee JT, Blayo N, Tepermeister I, Klemens FP, Mansfield WM, Ibbotson DE Journal of Vacuum Science & Technology B, 14(5), 3283, 1996 |