검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Review of progress in extreme ultraviolet lithography masks Hector S, Mangat P Journal of Vacuum Science & Technology B, 19(6), 2612, 2001 |
| 2 |
Inter and intramembrane resist critical dimension uniformity across a SCALPEL mask Nordquist K, Ainley E, Resnick DJ, Weisbrod E, Martin C, Engelstad R, Masnyj Z, Mangat P Journal of Vacuum Science & Technology B, 18(6), 3242, 2000 |