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| No. | Article |
|---|---|
| 1 |
Characterization of polycrystalline SiC layers grown by ECR-PECVD for micro-electro-mechanical systems Ricciardi C, Bennici E, Cocuzza M, Mandracci R, Bich D, Guglielmetti V, Barucca G Thin Solid Films, 427(1-2), 187, 2003 |