검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
High-purity, ultrahigh-resolution calixarene electron-beam negative resist Manako S, Ochiai Y, Yamamoto H, Teshima T, Fujita J, Nomura E Journal of Vacuum Science & Technology B, 18(6), 3424, 2000 |
| 2 |
High resolution organic resists for charged particle lithography Ochiai Y, Manako S, Fujita J, Nomura E Journal of Vacuum Science & Technology B, 17(3), 933, 1999 |
| 3 |
Proximity effect correction by the GHOST method using a scattering stencil mask Yamashita H, Nomura E, Manako S, Kobinata H, Nakajima K, Nozue H Journal of Vacuum Science & Technology B, 17(6), 2860, 1999 |
| 4 |
Sub-10 nm Lithography and Development Properties of Inorganic Resist by Scanning Electron-Beams Fujita J, Watanabe H, Ochiai Y, Manako S, Tsai JS, Matsui S Journal of Vacuum Science & Technology B, 13(6), 2757, 1995 |